| 摘要 |
A test system that tests a plurality of chips under test formed on a wafer under test, the test system comprising a plurality of test substrates that are arranged in overlapping layers and that each have a plurality of test circuits, whose function is determined for each wafer, formed thereon; a plurality of connecting sections that electrically connect, to the chips under test, the test circuits formed on one of the test substrates; and a control apparatus that controls each of the test circuits. Each test substrate has test circuits, with a function predetermined for each substrate, formed thereon.
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