| 摘要 |
<p>An apparatus for coating parts, comprising a deposition chamber (1) and a plurality of coating equipments (2, 3) for simultaneously or successively providing coating materials to said deposition chamber, wherein at least one of said coating equipment (2) is a metal filtered arc ion source, wherein at least one other of said coating equipment (3) is a laser ablation source, At least two of said coating equipments are removably connected to said deposition chamber via connecting flanges (10). At least two of said flanges are identical, so that one said coating equipment (2, 3) can be connected via different flanges to said deposition chamber.</p> |
