| 摘要 |
<p>The invention relates to a method for the production of a substrate (100) comprising embedded layers (104, 110) of getter material, including the following steps consisting in: producing a first stack comprising a layer (104) of a first getter material, disposed on a first base (102); producing of a second stack comprising a layer (110) of a second getter material, disposed on a second base (108); and bringing the stacks into contact with one another and thermocompressing the first stack against the second stack, the layers of the first and second getter materials being disposed between the first and second bases, at a temperature above or equal to the lowest temperature from the thermal activation temperatures of the first and second getter materials, such as to connect the layers of first and second getter materials solidly to one another.</p> |
