发明名称 ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 Provided is an elastic wave device in which the occurrence of migration in a wiring electrode or the like is inhibited. Also provided is a method for manufacturing the elastic wave device. The elastic wave device comprises: a first electrode film (2) formed on the upper surface of a piezoelectric substrate (1), the first electrode film constituting an electrode that includes an IDT electrode (3); and a second electrode film (6) formed so as to reach from the upper surface of the piezoelectric substrate (1) to part of the upper surface of the first electrode film (2). The second electrode film (6) constitutes an electrode that includes a wiring electrode (9) and pad electrodes (10a-10c), the second electrode film being formed from a laminated metallic layer obtained by laminating a plurality of metallic films. The bottom layer (6a) of the second electrode film (6) is formed from one metal selected from the group consisting of AlCu alloy, NiCr alloy, AlSi alloy, AlTi alloy, titanium, and copper. The bottom layer (6a) of the second electrode film (6) is formed so as to reach the side surface of the second electrode film (6).
申请公布号 WO2012063521(A1) 申请公布日期 2012.05.18
申请号 WO2011JP65654 申请日期 2011.07.08
申请人 MURATA MANUFACTURING CO., LTD.;TSUDA, MOTOJI 发明人 TSUDA, MOTOJI
分类号 H03H9/145;H01L41/09;H01L41/18;H01L41/22;H03H3/08 主分类号 H03H9/145
代理机构 代理人
主权项
地址