EXPOSURE METHOD AND EXPOSURE POSITION VERIFICATION METHOD

摘要

A member to be exposed (2) comprises an exposure pattern forming region, and a non-pattern forming region in at least a portion of the periphery thereof. When either applying a coating of a light-induced color changing material which changes color when illuminated with exposure light, or attaching a light-induced color changing member which changes color when illuminated with exposure light, to a region along the length of an exposure pattern in the non-pattern forming region of the member to be exposed (2), and illuminating same with exposure light which passes through a mask, the light-induced color changing region (22) comprising either the light-induced color changing material or the light-induced color changing member is illuminated together with the exposure pattern forming region and changes color. The exposure position in the exposure pattern forming region is verified, and the quality of the exposure adjudicated, by the change of color of the light-induced color changing region (22). It is thus easy to verify the exposure position either when dividing and exposing the exposure pattern forming region a plurality of times, or when either simultaneously or continuously making exposures of a plurality of the exposure pattern forming regions.