发明名称 COLLECTION OPTICS
摘要 An imaging system including a back-plane reflector having a concave aspherical reflecting surface and an outer diameter that is no greater than a first distance, with an aperture formed in the back-plane reflector, the aperture for admitting light from a field of view to the imaging system, a fore-plane reflector having a concave aspherical reflecting surface and an outer diameter that is no greater than the first distance, with an aperture formed in the fore-plane reflector, the aperture for discharging the light from the imaging system to an image plane, and a central reflector having a convex aspherical reflecting surface for receiving light from the fore-plane reflector and discharging the light from the imaging system through the aperture in the fore-plane reflector.
申请公布号 WO2012030837(A3) 申请公布日期 2012.05.18
申请号 WO2011US49757 申请日期 2011.08.30
申请人 KLA-TENCOR CORPORATION;KADKLY, AZMI 发明人 KADKLY, AZMI
分类号 G01N21/33;G01N21/88;H05K13/08 主分类号 G01N21/33
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