发明名称 |
FIELD EMISSION APPARATUS AND HAND-HELD NONDESTRUCTIVE INSPECTION APPARATUS |
摘要 |
<p>In the present invention, heat dissipation is improved by extending the creeping distance in a vacuum vessel according to the size of a flange part, without lengthening the vacuum vessel in the direction in which an electron beam is emitted. A vacuum vessel (20) in which a flange portion (20a) having a hollow portion between a cold cathode (9) and an anode (11) is formed is used. One example is a vacuum vessel (20) in which a cold cathode vessel (21) and an anode vessel (22), both cylindrically shaped, are communicated with each other and a hollow flange portion (20a) is formed between the vessels (21, 22). A focusing electrode (14) and a getter material (15), for example, are disposed in the hollow portion of the flange portion (20a). A cold cathode (9) which has a guard electrode on the outer side of the periphery of a carbon film structure (10) formed on a substrate (7) may be used. The carbon film structure (10) may be formed in the middle of an electrode surface of the substrate (7).</p> |
申请公布号 |
WO2012063379(A1) |
申请公布日期 |
2012.05.18 |
申请号 |
WO2011JP03242 |
申请日期 |
2011.06.08 |
申请人 |
LIFE TECHNOLOGY RESEARCH INSTITUTE INC.;ISHIGURO, YOSHIHISA;HABA, MASANORI |
发明人 |
ISHIGURO, YOSHIHISA;HABA, MASANORI |
分类号 |
H01J5/02;G21K5/00;G21K5/02;H01J1/46;H01J7/24;H01J35/16;H05G1/04 |
主分类号 |
H01J5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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