ION IMPLANTATION TOOL CLEANING APPARATUS AND METHOD

摘要

PURPOSE: An ion implantation tool cleaning device and method are provided to eliminate residues by distributing cleaning agent to an ion impregnator or an element. CONSTITUTION: One or more cleaning agent feed vessels(16) are structurally combined with housing. A cleaning agent flow circuit(18) is combined with the one or more cleaning agent feed vessels. A depletion-detection system determines a depletion state of the cleaning agent feed vessel which is predetermined. A processor and controller configuration element assembly(144) passes through cleaning agent of the one or more cleaning agent feed vessels through the cleaning agent flow circuit. The processor and controller configuration element assembly distributes the cleaning agent to an ion impregnator or an element.