| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow measurement device which excels in dust-proof nature even at an unsteady flow field, is hard to generate a characteristic error, and is reliable. <P>SOLUTION: In a flow measurement device which includes: a first fluid passage part which has a sub passage 8 which is arranged in the main passage 9 and into which fluid flows to take in a part of the fluid, a flow measurement element 6 which is arranged in the sub passage and in which a heating resistor pattern is formed, and a support medium 5 on which the flow measurement element is mounted, and consists of a surface on which the flow measurement element is formed and a passage formation surface of the sub passage; and a second fluid passage part which consists of a surface opposite to the surface on which the flow measurement element is mounted and the passage formation surface of the sub passage; the passage formation surface of the first fluid passage part which counters the upstream side of the flow of the fluid to the flow measurement element has an inclined surface which turns the flow of the fluid to the flow measurement element, and the inclined surface consists of two or more surfaces in different directions. <P>COPYRIGHT: (C)2012,JPO&INPIT |
