| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measuring device capable of precisely performing measurement by setting the relationship between sensitivity and occlusion in a balanced manner. <P>SOLUTION: The shape measuring device includes: an irradiation part which irradiates a specimen with line light; an imaging part which images, from a direction different from an irradiation direction of the line light, a portion on the specimen, which is irradiated with the line light; and a shape calculation part which calculates, based on an imaging result, a shape of the portion on the specimen, which is irradiated with the line light. An angle formed by the irradiation direction of the irradiation part and an imaging direction of the imaging part is within a range of 30 degrees or more and 60 degrees or less. <P>COPYRIGHT: (C)2012,JPO&INPIT |
