| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement device which can measure a height of an object quickly and with high accuracy. <P>SOLUTION: A measurement device for measuring a height of an object being in a measurement range includes: a light source which emits light including multiple wavelengths; a first optical system which includes an optical unit having an axial chromatic aberration, and which divides light emitted from the light source into multiple light beams and causes the optical unit to concentrate the light beams in respective focus ranges that include the measurement range but are different from each other; a detecting unit which detects, regarding the light beams, a wavelength having a focus position on a surface of the object; a second optical system which shares a portion of its optical path with the first optical system, and which guides the light beams, focused by the first optical system and reflected on the surface of the object, to the detecting unit; and a processing unit which selects one light beam from the light beams, and calculates a height of the object using a wavelength of the light beam selected, as the wavelength detected by the detecting unit. <P>COPYRIGHT: (C)2012,JPO&INPIT |
