发明名称 |
SEMICONDUCTOR LIGHT-EMITTING ELEMENT, FABRICATION METHOD THEREOF, CONVEX PART FORMED ON BACKING, AND CONVEX PART FORMATION METHOD FOR BACKING |
摘要 |
A convex part formation method of forming a convex part in parallel with a <110> direction of a backing on the backing having a {100} face as the top surface thereof, includes: (a) forming a mask layer in parallel with the <110> direction on the backing; (b) etch the backing so as to form a convex-part upper layer whose sectional shape on a cutting plane corresponding to a {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of &thetas;U; and (c) further etching the backing so as to form a convex-part lower layer whose sectional shape on the cutting plane corresponding to the {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of &thetas;D (where &thetas;D≠&thetas;U). |
申请公布号 |
US2012122257(A1) |
申请公布日期 |
2012.05.17 |
申请号 |
US201213356202 |
申请日期 |
2012.01.23 |
申请人 |
YASHIMA KIYOTAKA;KIWAKI YOSHINARI;MICHIRU KAMADA;KARINO SACHIO;NARUI HIRONOBU;OKANO NOBUKATA;SONY CORPORATION |
发明人 |
YASHIMA KIYOTAKA;KIWAKI YOSHINARI;MICHIRU KAMADA;KARINO SACHIO;NARUI HIRONOBU;OKANO NOBUKATA |
分类号 |
H01L33/14;H01L33/16 |
主分类号 |
H01L33/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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