| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and system for thin film deposition for solar cells, a method of manufacturing solar cells using the same, a method of manufacturing heterojunction solar cells, and heterojunction solar cells manufactured by the method. <P>SOLUTION: An apparatus for thin film deposition for solar cells comprises: two unit chambers 110a, 110b defined by a substrate W as a boundary; deposition gas injecting units 120a, 120b for injecting deposition gases G1, G2 to the two unit chambers 110a, 110b independently; and decomposition means 130a, 130b which is provided in each of the two unit chambers 110a, 110b, respectively, and decomposes the injected deposition gases. Both surfaces of the substrate W are exposed to the two unit chambers 110a, 110b, respectively. The apparatus for thin film deposition for solar cells and the method of manufacturing using the same allow deposition on both surfaces of a substrate while the substrate is fixed without any rotation. Therefore, as compared to the conventional technique that allows lamination of a single layer on one surface of a substrate, the number of processing units required for carrying out deposition can be decreased, significantly. <P>COPYRIGHT: (C)2012,JPO&INPIT |
