| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide inspection equipment capable of reducing reflection of an adsorption unit for adsorbing and holding a substrate when imaging the substrate. <P>SOLUTION: FPD inspection equipment 1 comprises: an inspection unit 100 and an entire image acquisition unit 13 each for applying predetermined processing to a substrate W to be inspected; and transportation stages 12, 20 and 21 each for placing the substrate W and transporting the substrate W, in which the transportation stages 12, 20 and 21 each include free rollers 121, 201 and 211 each for supporting the substrate W in a movable manner at least in a transporting direction D for transporting the substrate W; a driving mechanism 30 having an adsorption unit for adsorbing and holding the substrate W, and a driving unit 32 for supporting the adsorption unit and moving the adsorption unit along a transportation shaft 31 extending in parallel with the transporting direction D; and a control unit 1b for controlling lowering of the corresponding adsorption unit when the adsorption unit is positioned at a processing position of the entire image acquisition unit 13. <P>COPYRIGHT: (C)2012,JPO&INPIT |
