| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an assembly apparatus capable of assembling a semiconductor laser device having a semiconductor laser element whose stability of lifetime is made satisfactory by restricting the H<SB POS="POST">2</SB>O concentration in enclosure atmosphere closed by using a cap. <P>SOLUTION: The assembly apparatus comprises: an assembling chamber which can be sealed from the outside, and where an assembly process is performed in which a cap for sealing a nitride semiconductor laser element with a gas is bonded on a stem in which the nitride semiconductor laser element comprising nitride semiconductor layers stacked are laminated; a moisture concentration control part for controlling the moisture concentration in gas atmosphere in the assembling chamber to be equal to or less than 400 ppm; a first pressure adjustment part for adjusting the pressure in the assembling chamber; a load lock chamber capable of being sealed from ambient air and adjacent to the assembling chamber; and a second pressure adjustment part for adjusting the pressure in the load lock chamber. The second pressure adjustment part is a vacuum pump. <P>COPYRIGHT: (C)2012,JPO&INPIT |
