MASTER DISK AND MANUFACTURING METHOD THEREOF, WORKING MOLD AND MANUFACTURING METHOD THEREOF, ELECTRON BEAM EXPOSURE DEVICE, AND ELECTRON BEAM EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To suppress the occurrence of an error due to the resolution of a detector.

SOLUTION: In a master disk in which a data part and a servo part are formed on a substrate and which is used when a magnetic recording medium or a mold used to manufacture the magnetic recording medium is manufactured by imprint, a data pattern is arranged in the data part so as to satisfy the following conditions (1) and (2). (1) In a direction going toward the data part from the servo part of each track, a distance from a servo pattern to be a reference of timing matching for starting to detect the data pattern to a data pattern closest to the servo part is natural number times as long as resolution in a detector. (2) In each track, a distance from a data pattern in the data part to another data pattern formed adjacently to the data pattern is natural number times as long as resolution in the detector.

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