| 摘要 |
PURPOSE: A roll-to-roll sputtering system is provided to hold plasma between rotating cylindrical opposed targets efficiently and thereby minimize damage to a deposited object by plasma. CONSTITUTION: A roll-to-roll sputtering system(100) comprises a housing(110), a sputtering gas feeder(120), a winder(130), a rewinder(131), a sputter gun(140a-140d), a power supply(160a-160d), a cooling drum(170), and a cooling system(172). The winder and the rewinder interlock with each other to wind or unwind a deposited film to be continuously supplied to a deposition area within a vacuum chamber. The sputter gun is arranged in the vacuum chamber in order to provide particles to be deposited on the film. The cooling drum contacts and cools the deposited film that passes through a deposition area. The cooling system provides a cooling medium to the cooling drum to cool the cooling drum.
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