DEFLECTOR ARRAY, CHARGED PARTICLE BEAM DRAWING APPARATUS, DEVICE MANUFACTURING METHOD, AND DEFLECTOR ARRAY MANUFACTURING METHOD

摘要

PURPOSE: A deflector array, a charged particle beam drawing apparatus, a device manufacturing method, and a method for manufacturing the deflector array are provided to improve a manufacturing yield by preparing a partitioned deflector chip. CONSTITUTION: A base substrate(207) includes a plurality of openings. A plurality of deflector chips(116) includes the plurality of openings. The plurality of deflector chips includes a plurality of electrode pairs. The electrode pairs are arranged on both sides of at least some openings of the openings on the deflector chips. The plurality of deflector chips is fixed to the base substrate.