| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mounting table capable of correcting a position of a revolving shaft easily without changing a compensation table determined beforehand, and to provide a shape measuring device and a shape measuring method. <P>SOLUTION: A mounting table comprises: a mounting part whose mounting surface on which a specimen is placed is rotatable around at least one axis; a base part which supports the mounting part; and a reference part which is fixed to the base part and regulates the position of the mounting surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
