| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide means for eliminating an error accompanying transfer of a table, etc. and measuring the shape of an object to be measured with high accuracy. <P>SOLUTION: A shape measurement device LMS includes: a work transfer unit 10 and a mirror unit 30 which relatively transfer an object W to be measured, and first and second probe light; an optical unit 20 which irradiates a measuring plane of the object W to be measured with the first and second probe light with irradiation positions separated at a predetermined interval and outputs first and second light receiving signals according to positions of reflected light; and a control unit 50 which controls actuation of the units. The control unit 50 is constituted so as to sequentially transfer measuring parts of the measuring plane to positions separated at the same degree as the predetermined interval along a measuring line, to calculate inclination angles of the irradiation positions of the first and second probe light for every measuring part, and to derive the shape of the measuring plane along the measuring line based on inclination angle information of the plurality of calculated measuring parts. <P>COPYRIGHT: (C)2012,JPO&INPIT |
