| 摘要 |
PURPOSE: A spin-head, a substrate processing apparatus, and a substrate processing method are provided to stably maintain chuck pins on a supporting position regardless of the rotation of a substrate. CONSTITUTION: Chuck pins are upwardly protruded from a main body. A chuck pin transferring unit transfers the chuck pins between a supporting position and a stand-by position. The chuck pin transferring unit includes a shaft pin(640b), a rotary rod(620b), and a driving unit. The shaft pin fixes the shaft pin to the main body. The driving unit rotates the rotary rod based on the shaft pin as a rotary shaft.
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