| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser-machining apparatus capable of laser-machining on working positions distributed in an indexing feed direction (Y-axis direction) orthogonal to a machining feed direction (X-axis direction) in one laser-machining step. <P>SOLUTION: The laser-machining apparatus includes: a chuck table that holds a workpiece, a laser beam irradiation unit; and a machining feeding unit (X-axis direction) and an indexing feeding unit (Y-axis direction) that relatively machine and feed the chuck table, respectively. The laser beam irradiation unit includes: a first laser beam scanning unit that is located between a laser beam oscillator and a light condenser, and defines a region in which the laser beam should be irradiated to the workpiece held on the chuck table with deflecting an optical axis of laser beam entering the light condenser at least in a X-axis direction; and a second laser beam scanning unit that deflects the laser beam oscillated from the laser beam oscillator in the X-axis direction and a Y-axis direction in the region defined by the first laser beam scanning unit. <P>COPYRIGHT: (C)2012,JPO&INPIT |
