| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure a rotation angle with high accuracy and in a short time. <P>SOLUTION: A rotation shaft 3 of a rotary encoder 2 is mounted on a rotation shaft 1a of a measured object 1 that is rotationally driven, and a displacement of an encoder body 2a in a surface orthogonal to the rotation shaft 3 of the rotary encoder 2 is regulated to fall within a certain allowance so that an eccentricity between the rotation shaft 1a of the measured object and the rotation shaft 3 of the rotary encoder 2 is allowed. An eccentricity amount of the rotation shaft 3 of the rotary encoder 2 relative to the rotation shaft 1a of the measured object 1 is detected in a noncontact manner. A rotation angle of the rotation shaft 3 of the rotary encoder 2 is measured based on a code read by a reading unit of the rotary encoder 2. The rotation angle measured by using the rotary encoder 2 is corrected based on at least the detected eccentricity amount. <P>COPYRIGHT: (C)2012,JPO&INPIT |
