| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrying device enabling to correctly grip a workpiece by quickly recognizing the reference position and rotational phase of the workpiece on a workpiece supply table with high accuracy. <P>SOLUTION: In the carrying device, a rotational phase changing mechanism 17 is provided for rotating a loader head 16 around its axis in the rising/falling direction, a camera 23 is provided on a loader 12, and an imaging loader-control means 33 is provided which is constituted by a control device 5 and an image processor 25. The means 33 performs first imaging processing to image the workpiece W on the workpiece supply table 3, and first recognizing processing to recognize the reference position of the workpiece W from the image data. The position of the loader 12 is adjusted so that the center of a camera visual field is located on the recognized workpiece reference position. At the adjusted position, the workpiece W is imaged again. The rotational phase around the reference position of the workpiece W is recognized from the image data obtained by second imaging processing. The rotational phase of a chuck 19 is corrected depending on a recognition result. <P>COPYRIGHT: (C)2012,JPO&INPIT |
