| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve measurement accuracy of shape measurement of a specimen measured by an optical sensor part. <P>SOLUTION: The shape measurement device comprises: a sensor part (20) including a light irradiation part (91) for irradiating a specimen with line light and a detection part (92) for detecting the line light with which the specimen is irradiated from a direction different from an irradiation direction of the line light; a movement part for moving the sensor part (20) in respective coordinate axis directions being mutually orthogonal of a coordinate system; a rotation mechanism for rotatably supporting the sensor part (20) against the movement part; and a rotation direction calculation part (359) for calculating a rotation direction of the sensor part (20) against the movement part by detecting a sphere indicating a reference position of the coordinate system. <P>COPYRIGHT: (C)2012,JPO&INPIT |
