发明名称 METHOD OF MANUFACTURING PIEZOELECTRIC FILM, PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS
摘要 A method of manufacturing a piezoelectric film using a piezoelectric film-forming composition. The piezoelectric film-forming composition contains Bi, Fe, Mn, Ba, and Ti and the mole ratio of Bi to the total amount of Fe and Mn is 1.02 or more 1.08 or less.
申请公布号 US2012117770(A1) 申请公布日期 2012.05.17
申请号 US201113296102 申请日期 2011.11.14
申请人 SEIKO EPSON CORPORATION 发明人 SAKAI TOMOHIRO
分类号 H01L41/22 主分类号 H01L41/22
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