发明名称 |
ABRASIVE ARTICLE WITH ARRAY OF COMPOSITE POLISHING PADS |
摘要 |
A polishing article with a plurality of polishing pads adapted to polish a substrate. Gimbal structures are attached to the polishing pads that permit the polishing pads to move independently along at least a pitch axis and a roll axis. Stems supported by preload flexures apply preloads through dimple structures to the polishing pads. A plurality of stand-offs provide fixed boundary conditions between the preload and the gimbal structures. Recesses allow for the preload flexures to move vertically. |
申请公布号 |
US2012122380(A1) |
申请公布日期 |
2012.05.17 |
申请号 |
US201113275948 |
申请日期 |
2011.10.18 |
申请人 |
SCHWAPPACH KARL G.;BOUTAGHOU ZINE-EDDINE |
发明人 |
SCHWAPPACH KARL G.;BOUTAGHOU ZINE-EDDINE |
分类号 |
B24D11/00 |
主分类号 |
B24D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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