| 摘要 |
<P>PROBLEM TO BE SOLVED: To restrict operation of a sub cooler in association with a control state of a main controller. <P>SOLUTION: On one end of a heat conductor 17 (a sensor body 13, a cooling block 15, a cooling plate 16), there is attached an electrothermal cooling element (first electrothermal cooling element) 2 for mirror surface cooling. On the other end of the heat conductor 17, there is attached, as an auxiliary cooler, an electrothermal cooling element (second electrothermal cooling element) 18 having a large cooling capacity. A supply current to the first electrothermal cooling element 2 is controlled by a main controller 24, and a supply current to the second electrothermal cooling element 18 is controlled by a sub controller 25. In this configuration, an ON/OFF command from a sub cooler control ON/OFF switch 29 is transmitted through the main controller 24 to the sub controller 25. The main controller 24 diagnoses various abnormalities. When the main controller 24 determines an abnormality, it inhibits the activation of the sub controller 25 and stops the operation of the sub controller 25. <P>COPYRIGHT: (C)2012,JPO&INPIT |
