发明名称 |
Method for Axial Alignment of Charged Particle Beam and Charged Particle Beam System |
摘要 |
A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts of the orbit of the beam or the distributions of three astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel. |
申请公布号 |
US2012119107(A1) |
申请公布日期 |
2012.05.17 |
申请号 |
US201113297628 |
申请日期 |
2011.11.16 |
申请人 |
SAWADA HIDETAKA;SASAKI TAKEO;JEOL LTD. |
发明人 |
SAWADA HIDETAKA;SASAKI TAKEO |
分类号 |
H01J1/50 |
主分类号 |
H01J1/50 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|