| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide means capable of improving line width linearity by optimizing current density uniformity of a figure 8 having restricted dimensions, as to an automatic adjusting method of a charged particle beam drawing device and the charged particle beam drawing device. <P>SOLUTION: An automatic adjusting system of a charged particle beam drawing device includes beam alignment means 29 for adjusting a position of a charged particle beam to irradiate a first molded opening plate with respect to an opening position of the opening plate in the foregoing part of the first molded opening plate 3, means for measuring a current density distribution of the charged particle beam passing through the opening of a second molded opening plate 7 at a height position of the opening plate and means for extracting a linear component from the current density distribution obtained by the measuring means, and is configured so as to adjust an irradiation position of the first molded opening plate 3 by the beam alignment means 29 so that inclined components obtained by the measuring means and the extracting means are removed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
