| 摘要 |
The region and spot size of light that irradiates a specimen are changed. Provided is an illumination optical system including beam-deflecting means for changing the deflecting direction of light from a light source; a wavefront modulation device at a position optically conjugate with the beam-deflecting means and capable of modulating the wavefront of the light; a Fourier transform system that focuses the light from the wavefront modulation device and performs Fourier transformation thereon; an inverse Fourier transform system that performs inverse Fourier transformation on the light from the Fourier transform system to form a collimated light beam; and an objective optical system that focuses the light from the inverse Fourier transform system on an object, wherein the Fourier transform system includes a mechanism capable of changing the focal length while maintaining the focal position at the inverse Fourier transform system side at a fixed position.
|
