发明名称 |
Heater design for heat-trimmed thin film resistors |
摘要 |
A heater design for post-process trimming of thin-film transistors is described. The heater incorporates low sheet-resistance material deposited in non-active connecting regions of the heater to reduce heat generation and power consumption in areas distant from active heating members of the heater. The heating members are proximal to a thin-film resistor. The resistance of the thin-film resistor can be trimmed permanently to a desired value by applying short current pulses to the heater. Optimization of a heater design is described. Trimming currents can be as low as 20 mA.
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申请公布号 |
US2012119872(A1) |
申请公布日期 |
2012.05.17 |
申请号 |
US201113339968 |
申请日期 |
2011.12.29 |
申请人 |
LEUNG CALVIN;LE NEEL OLIVIER;STMICROELECTRONICS PTE PTD. |
发明人 |
LEUNG CALVIN;LE NEEL OLIVIER |
分类号 |
H01C10/00;H01C17/075 |
主分类号 |
H01C10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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