| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique of removing donor impurities and acceptor impurities in the distillate of chlorosilanes so as to reduce their contained amount. <P>SOLUTION: This method for purifying chlorosilanes includes at least three steps among a hydrogenation step 101 and/or a chlorination step 102, an impurity conversion step 103 and a purification step 104. In the impurity conversion step 103, an aldehyde compound represented by general formula: Ar-R-CHO (Ar is a substituted or unsubstituted aryl group; and R is a ≥2C organic group) is added, and donor impurities and acceptor impurities contained in a chlorosilane distillate is converted into high boilers. The chlorosilane distillate after the donor impurities and the acceptor impurities have been converted into high boilers is sent to the purification step 104. In the purification step 104, by using distillation columns or the like, high purity chlorosilanes are recovered outside of the system and obtained, from which donor impurities and acceptor impurities have been thoroughly removed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
