| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method capable of forming a multilayer film having a gradient layer between adjacent thin films, which has a gentle concentration gradient in the gradient layer. <P>SOLUTION: Cylindrical first and second targets 31b, 32b are aligned so that a first scattering area R1 that is a scattering area of sputter particles from the first target 31b and a second scattering area R2 that is a scattering area of sputter particles from the second target 32b are overlapped with each other, and a substrate 10 is moved from the first target 31b side to the second target 32b side in the alignment directions of the first and second targets 31b, 32b to be passed through the first and second scattering areas R1, R2 in a state where an alternating voltage is applied to between a first cathode 31a in the first target 31b and a second cathode 32b in the second target 32b, whereby first and second thin films 11, 13 and a gradient layer 12 are formed on the substrate 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
