| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating system including a new technical means for enabling non-contact type transportation in the transportation of a substrate. <P>SOLUTION: The coating system is provided with a transportation device 1 having a floating unit 10 floating the substrate W and a transportation unit 20 for transporting the lifted substrate W and a coating applicator 3 having a nozzle 31 for discharging a coating liquid to a top surface of the substrate W. The floating unit 10 has a vibrator 6 and a vibration plate 7 vibrating by the action of the vibrator 6 and floating the substrate W by radiation pressure by the vibration, and the vibration plate 7 is provided to the direct under position of the nozzle 31. <P>COPYRIGHT: (C)2012,JPO&INPIT |
