| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an AF device that detects a focus position error and carries out AF control with the small amount of reflected light from AF light, and a microscope device including the AF device. <P>SOLUTION: An AF device includes: an AF light detection unit that detects AF light from an object to be detected; focal position detection means that detects a focus position error based on a signal from the AF light detection unit; focusing operation means that determines the focal position of an object lens at a predetermined position of the object to be detected based on the focus position error signal; and filter means that transmits a spatial frequency component included in an image of the AF light. <P>COPYRIGHT: (C)2012,JPO&INPIT |
