发明名称 |
DIFFUSING AGENT COMPOSITION, AND METHOD FOR FORMING AN IMPURITY DIFFUSION LAYER |
摘要 |
A diffusing agent composition contains a condensation product (A) and an impurity diffusion component (B). The condensation product (A) is a reaction product yielded by hydrolyzing an alkoxysilane. The impurity diffusion component (B) is a monoester or diester of phosphoric acid, or a mixture thereof. |
申请公布号 |
US2012122306(A1) |
申请公布日期 |
2012.05.17 |
申请号 |
US201113292461 |
申请日期 |
2011.11.09 |
申请人 |
MORITA TOSHIRO;KAMIZONO TAKASHI;C/O TOKYO OHKA KOGYO CO., LTD. |
发明人 |
MORITA TOSHIRO;KAMIZONO TAKASHI |
分类号 |
H01L21/22;C09D5/00 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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