PLASMA DIAGNOSE DEVICE WITH AUXILIARY DOUBLE PROBES

摘要

PURPOSE: An apparatus for diagnosing plasma with a secondary double is provided to improve the measurement accuracy of plasma state variables by preventing measurement signals from being distorted due to the noise of RF power. CONSTITUTION: A main probe(110) measures plasma state variables. A first secondary probe(120) is parallelly connected to the main probe. The first secondary probe is arranged to be contiguous to the main probe. A second secondary probe(140) is parallelly connected to the main probe. A DC power supply(130) applies a bias voltage while connecting the first secondary probe and the second secondary probe.