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发明名称
APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION
摘要
申请公布号
EP2334842(B1)
申请公布日期
2012.05.16
申请号
EP20090788288
申请日期
2009.08.25
申请人
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人
MAAS, DIEDERIK JAN;VAN SOMEREN, BOB;LEXMOND, AXEL SEBASTIAAN;SPEE, CAROLUS IDA MARIA ANTONIUS;DUISTERWINKEL, ANTONIE ELLERT;VERMEER, ADRIANUS JOHANNES PETRUS MARIA
分类号
C23C16/455
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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