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发明名称
摘要
申请公布号
JP4930897(B2)
申请公布日期
2012.05.16
申请号
JP20060056880
申请日期
2006.03.02
申请人
发明人
分类号
C03C8/02;C03C8/04;C03C8/24;H01J11/46;H01J11/48;H01J29/86;H01L23/10
主分类号
C03C8/02
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代理人
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