| 摘要 |
PURPOSE: A substrate processing apparatus is provided to lift a lift pin as maintaining vacuum condition of a chamber, by using magnetic coupling. CONSTITUTION: A chamber(10) processes a substrate. A plurality of housing(41) are installed on the bottom of the chamber, and are linked with the chamber through air. A lift part is comprised in the housing. The lift part is formed with a magnet. A lift pin is comprised in the outside of the housing. The lift pin includes a magnet(45) magnetically coupled with the lift part.
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