| 摘要 |
PURPOSE: A liquid flow rate control device, a liquid flow rate control method, and a storage medium are provided to increase a controllable flow rate range by mixing a plurality of flow rate control units which have different controllable flow rate ranges. CONSTITUTION: A plurality of flow rate control units(21A,21B,21C) is installed in parallel to each other. A controller(26) controls a plurality of flow rate control units. The plurality of flow rate control units comprises first and second flow rate control units. The first flow rate control unit includes a first flow rate control valve(23A). The first flow rate control valve has a first flux rate control range. The second flow rate control unit includes a second flow rate control valve(23B). The second flow rate control valve has a second flux rate control range. The controller controls the first and second flow rate control units. The controller increases the total flow rate of liquid flowing in the first and second flow rate control units. |
