INTEGRATED ANTENNA DEVICE MODULE FOR GENERATING TERAHERTZ CONTINOUS WAVE AND FABRICATION METHOD THEREOF

摘要

PURPOSE: An integrated antenna device module for generating terahertz continuous waves and a fabrication method thereof are provided to reduce the resolution limit of an optical lens by using an existing optical lens as a metamaterial lens. CONSTITUTION: A photoconductive antenna(10) of an integrated antenna device module for generating terahertz continuous waves comprises a photoconductive thin film pattern(11), a metal electrode(12), and a focusing meta material lens(13) for controlling three-dimensional images of an object using high resolution. A substrate is high resistant silicon or InP(Indium Phosphide). The metal electrode applies a DC bias voltage to the photoconductive thin film pattern. The photoconductive thin film pattern is deposited on a front surface of the substrate. The photoconductive thin film pattern irradiates tera-herts continuous waves according to the incidence of the femto second laser pulse having the pulse time of an ultrashort pulse.