发明名称 Apparatus for Breaking Processed Object Using Curved Surface Close-adhesion
摘要 PURPOSE: An apparatus for breaking an object by using curved surface close-adhesion is provided to greatly shorten time and process for a cutting process since an object is not transferred to other equipment for a braking process. CONSTITUTION: A laser irradiation part irradiates an inside of an object in a work stage with laser and forms a phase change domain. A transfer temporarily fixes and carries the object which is completely processed in the work stage. The object, which is not processed or completely processed, is settled on a standby part(20). A braking part(80) and a backlight part are installed in a lower part of the standby part to be horizontally movable. The braking part has an upper end curved surface which increases a crack in each phase change domain while the object transferred from the work stage closely adheres.
申请公布号 KR101146642(B1) 申请公布日期 2012.05.16
申请号 KR20100075330 申请日期 2010.08.04
申请人 发明人
分类号 H01L21/78 主分类号 H01L21/78
代理机构 代理人
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