| 摘要 |
PURPOSE: A laser processing apparatus is provided to supplement the loss of light on an objective lens by increasing the intensity of laser emitted from a laser source. CONSTITUTION: A laser processing apparatus comprises a light source, a light source converting unit, a spatial light modulator, an objective lens(3), an NA change unit, a memory unit, and a control unit. The light source converting unit converts the light source into approximately surface light source as a second light source. The spatial light modulator is arranged in a position conjugated with the processed surface of an object and the second light source. The objective lens projects the laser beam emitted from the spatial light modulator to the processed surface of the object. The NA change unit changes the NA of the laser beam emitted from the second light source. The memory unit saves NA change conditions for laser beams set according to the types of objective lenses. The control unit controls the NA change of the NA change unit according to the NA change condition corresponding to a process or the type of an object.
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