发明名称 |
LIGHTING DEVICE FOR ALIGNMENT AND EXPOSURE DEVICE HAVING THE SAME |
摘要 |
PURPOSE: A light illuminating apparatus and an exposing apparatus including the same are provided to illuminate substrate marks on a printed circuit board and mask marks on a mask when the printed circuit board and the mask are aligned. CONSTITUTION: A light illuminating apparatus includes a light brightness adjusting unit, a contrast detecting unit, a deviation detecting unit, and a light condition determining unit. The light brightness adjusting unit changes the brightness of a light illuminating apparatus(10). The contrast detecting unit detects contrast between a substrate mark and a printed circuit board and contrast between a mask mark and the printed circuit board(24). The deviation detecting unit detects deviations of substrate mark and mask mark positions. The light condition determining unit determines adequate light brightness.
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申请公布号 |
KR20120048470(A) |
申请公布日期 |
2012.05.15 |
申请号 |
KR20110101786 |
申请日期 |
2011.10.06 |
申请人 |
ADTEC ENGINEERING CO., LTD. |
发明人 |
TANEMURA TUGUNORI;NAKAJIMA YU;NAGOYA JUN;OYA YOSHIYUKI |
分类号 |
G03F7/20;G03F9/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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