发明名称 LIGHTING DEVICE FOR ALIGNMENT AND EXPOSURE DEVICE HAVING THE SAME
摘要 PURPOSE: A light illuminating apparatus and an exposing apparatus including the same are provided to illuminate substrate marks on a printed circuit board and mask marks on a mask when the printed circuit board and the mask are aligned. CONSTITUTION: A light illuminating apparatus includes a light brightness adjusting unit, a contrast detecting unit, a deviation detecting unit, and a light condition determining unit. The light brightness adjusting unit changes the brightness of a light illuminating apparatus(10). The contrast detecting unit detects contrast between a substrate mark and a printed circuit board and contrast between a mask mark and the printed circuit board(24). The deviation detecting unit detects deviations of substrate mark and mask mark positions. The light condition determining unit determines adequate light brightness.
申请公布号 KR20120048470(A) 申请公布日期 2012.05.15
申请号 KR20110101786 申请日期 2011.10.06
申请人 ADTEC ENGINEERING CO., LTD. 发明人 TANEMURA TUGUNORI;NAKAJIMA YU;NAGOYA JUN;OYA YOSHIYUKI
分类号 G03F7/20;G03F9/00 主分类号 G03F7/20
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