发明名称 |
Apparatus for manipulation of an optical element |
摘要 |
The invention relates to an apparatus for manipulation of an optical element (7) in up to six degrees of freedom with respect to a structure (8) via at least three actuator devices (9). The actuator devices (9) each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points (11) of the actuator devices (9) acting directly on the optical element (7). |
申请公布号 |
US8179621(B2) |
申请公布日期 |
2012.05.15 |
申请号 |
US20100716357 |
申请日期 |
2010.03.03 |
申请人 |
MUEHLBEYER MICHAEL;LIPPERT JOHANNES;CARL ZEISS SMT GMBH |
发明人 |
MUEHLBEYER MICHAEL;LIPPERT JOHANNES |
分类号 |
G02B7/02;G02B7/182;G03F7/20 |
主分类号 |
G02B7/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|