A capacitive sensor includes a fixed electrode and a movable electrode that is movably supported by an anchor portion through a beam portion. The fixed electrode and the movable electrode are opposed to each other with a gap interposed therebetween, thereby constituting a detecting unit. A capacitance suitable for a size of the gap is detected to detect a predetermined physical value. At least one of an end of the beam portion connected to the anchor portion and an end of the beam portion connected to the movable electrode is provided with a stress moderating unit that moderates a stress.
申请公布号
US8176782(B2)
申请公布日期
2012.05.15
申请号
US20070296554
申请日期
2007.04.25
申请人
FURUKUBO EIICHI;WAKABAYASHI DAISUKE;MIYAJIMA HISAKAZU;OHBUCHI MASAO;AOKI RYO;PANASONIC ELECTRIC WORKS CO., LTD.