发明名称 Helicon plasma source with permanent magnets
摘要 A helicon plasma source has a discharge tube, a radio frequency antenna disposed proximate the discharge tube, and a permanent magnet positioned with respect to the discharge tube so that the discharge tube is in a far-field region of a magnetic field produced by the permanent magnet.
申请公布号 US8179050(B2) 申请公布日期 2012.05.15
申请号 US20070003330 申请日期 2007.12.21
申请人 CHEN FRANCIS F.;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 CHEN FRANCIS F.
分类号 H01J7/24 主分类号 H01J7/24
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