MIKROMECHANISCHER SENSOR UND VERFAHREN ZU SEINER HERSTELLUNG,申请号AT19990952247T-传众专利搜索

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发明名称	MIKROMECHANISCHER SENSOR UND VERFAHREN ZU SEINER HERSTELLUNG
摘要
申请公布号	AT555056(T)	申请公布日期	2012.05.15
申请号	AT19990952247T	申请日期	1999.08.03
申请人	INFINEON TECHNOLOGIES AG	发明人	AIGNER, ROBERT;BEVER, THOMAS;TIMME, HANS-JOERG
分类号	B81B3/00;G01L9/12;B81C1/00;H01L29/84;H04R19/00;H04R19/04;H04R31/00	主分类号	B81B3/00
代理机构		代理人
主权项
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